The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 23, 2021

Filed:

Mar. 27, 2018
Applicant:

Excillum Ab, Kista, SE;

Inventors:

Per Takman, Kista, SE;

Tomi Tuohimaa, Kista, SE;

Assignee:

EXCILLUM AB, Kista, SE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 35/08 (2006.01); H05G 1/26 (2006.01); H05G 1/36 (2006.01); H01J 35/14 (2006.01); H01J 35/16 (2006.01);
U.S. Cl.
CPC ...
H01J 35/116 (2019.05); H05G 1/265 (2013.01); H05G 1/36 (2013.01); H01J 35/147 (2019.05); H01J 35/16 (2013.01); H01J 2235/082 (2013.01); H01J 2235/20 (2013.01);
Abstract

A method for generating X-ray radiation, the method including providing a liquid target in a chamber, directing an electron beam towards the liquid target such that the electron beam interacts with the liquid target to generated X-ray radiation, estimating a number of particles produced from the interaction between the electron beam and the liquid target by measuring a number of positively charged particles in the chamber and eliminating a contribution from scattered electrons to the estimated number of particles, and controlling the electron beam, and/or a temperature in a region of the liquid target in which the electron beam interacts with the target, such that the estimated number of particles is below a predetermined limit. Also, a corresponding X-ray source.


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