The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2021
Filed:
Jun. 14, 2018
Applicant:
Texas Instruments Incorporated, Dallas, TX (US);
Inventor:
Jose A. Martinez, Murphy, TX (US);
Assignee:
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); B81C 1/00 (2006.01); B81B 7/02 (2006.01); G09G 3/34 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0841 (2013.01); B81B 7/02 (2013.01); B81C 1/00047 (2013.01); B81B 2201/042 (2013.01); B81C 2201/0132 (2013.01); B81C 2201/0133 (2013.01); G09G 3/346 (2013.01);
Abstract
A microelectromechanical system (MEMS) structure includes at least first and second metal vias. Each of the first and second metal vias includes a respective planar metal layer having a first thickness and a respective post formed from the planar metal layer. The post has a sidewall, and the sidewall has a second thickness greater than 14% of the first thickness.