The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2021
Filed:
Feb. 27, 2017
Adeka Corporation, Tokyo, JP;
Hiroki Sato, Tokyo, JP;
Naoki Yamada, Tokyo, JP;
Tsubasa Shiratori, Tokyo, JP;
Haruyoshi Sato, Tokyo, JP;
ADEKA CORPORATION, Tokyo, JP;
Abstract
A raw material for forming a thin film that includes a compound represented by General Formula (1) below. In the formula, Rrepresents a linear or branched alkyl group having 2 to 4 carbon atoms; Rto Reach independently represent a linear or branched alkyl group having 1 to 4 carbon atoms; A represents an alkanediyl group having 1 to 4 carbon atoms; and M represents titanium, zirconium or hafnium. Provided that when M represents zirconium, A represents an alkanediyl group having 3 or 4 carbon atoms. When M represents titanium or hafnium, it is preferred that A represents an alkanediyl group having 2 or 3 carbon atoms. When M represents zirconium, it is preferred that A represent an alkanediyl group having 3 carbon atoms.