Device and method of manufacturing high aspect ratio structures

Abstract

A method of manufacturing a Lithium battery () with a current collector formed of pillars () on a substrate face (), wherein the method comprises: forming elongate and aligned structures forming electrically conductive pillars () on the substrate face () with upstanding pillar walls extending from a pillar base to a pillar top; wherein the pillars are covered with a laminate comprising a first electrode (), a solid state electrolyte layer (); a second electrode layer (), and a topstrate () forming an electrode part; and wherein at least one of the first electrode layer, second electrode layer and topstrate layer is non-conformally coated to prevent Lithium intercalation into the first or second electrode near the pillar base by limiting cracking at the pillar base when volume expansion/contraction of the electrode layers happens during the battery charge/discharge cycles.