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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10923560 B1

PDFFull Text
Date of Patent:
Feb. 16, 2021

Filed:

Jan. 28, 2019

Capacitor including electrode and dielectric layer each containing silicon, and method for manufacturing capacitor

Applicant:

Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;

Inventors:

Takahiro Koyanagi, Osaka, JP;

Yuuko Tomekawa, Osaka, JP;

Takeshi Harada, Toyama, JP;

Yoshio Kawashima, Toyama, JP;

Assignee:

PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD., Osaka, JP;

Attorney:

McDermott Will and Emery LLP

Primary Examiner:

Nicholas J Tobergte

Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 49/02 (2006.01); H01L 21/3215 (2006.01); H01L 21/285 (2006.01); H01L 21/02 (2006.01); H01L 27/146 (2006.01); H01L 27/108 (2006.01);
U.S. Cl.
CPC ...
H01L 28/40 (2013.01); H01L 21/0228 (2013.01); H01L 21/02181 (2013.01); H01L 21/02189 (2013.01); H01L 21/02205 (2013.01); H01L 21/02299 (2013.01); H01L 21/28568 (2013.01); H01L 21/3215 (2013.01); H01L 27/14636 (2013.01); H01L 27/14665 (2013.01); H01L 28/60 (2013.01); H01L 28/91 (2013.01); H01L 27/10814 (2013.01); H01L 27/10852 (2013.01); H01L 27/14609 (2013.01);
Abstract

A capacitor includes a first electrode; a second electrode facing the first electrode; and a dielectric layer which is disposed between the first electrode and the second electrode and which is in contact with the first electrode. The first electrode includes a first portion including an interface between the first electrode and the dielectric layer, the dielectric layer includes a second portion including the interface, and the first portion and the second portion each contain silicon. A concentration distribution of the silicon along a thickness direction of the first portion and the second portion includes a convex portion intersecting the interface.

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