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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10923372 B1

PDFFull Text
Date of Patent:
Feb. 16, 2021

Filed:

Aug. 19, 2016

Gas injection device

Applicant:

Sinfonia Technology Co., Ltd., Minato-ku, JP;

Inventors:

Toshihiro Kawai, Minato-ku, JP;

Yasushi Taniyama, Minato-ku, JP;

Munekazu Komiya, Minato-ku, JP;

Takashi Shigeta, Minato-ku, JP;

Assignee:

SINFONIA TECHNOLOGY CO., LTD., Minato-ku, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Matthew W Jellett

Int. Cl.
CPC ...
F16K 31/122 (2006.01); H01L 21/673 (2006.01); F16K 15/14 (2006.01); H01L 21/677 (2006.01); F16K 15/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67389 (2013.01); F16K 15/028 (2013.01); F16K 15/147 (2013.01); F16K 31/1221 (2013.01); H01L 21/67393 (2013.01); H01L 21/67772 (2013.01); H01L 21/67775 (2013.01);
Abstract

There is provided a gas injection device configured to prevent entry of atmospheric air when charging gas into a FOUP. In order to realize such a gas injection device, the gas injection device is structured so as to include: a gas supply portthrough which inert gas is supplied; a nozzle main bodyincluding a gas passagecommunicating with the gas supply port; an opening/closing mechanismconfigured to close the gas supply port; and an openerconfigured to cause the opening/closing mechanismto open the gas supply portclosed by the opening/closing mechanism

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