The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2021
Filed:
Oct. 30, 2017
Asm Ip Holding B.v., Almere, NL;
David Kohen, Phoenix, AZ (US);
Harald Benjamin Profijt, Veldhoven, NL;
Andrew Kretzschmar, Austin, TX (US);
ASM IP Holding B.V., Almere, NL;
Abstract
A method for forming a forming a semiconductor structure is disclosed. The method may include: forming a silicon oxide layer on a surface of a substrate, depositing a silicon germanium (SiGe) seed layer directly on the silicon oxide layer, and depositing a germanium (Ge) layer directly on the silicon germanium (SiGe) seed layer. Semiconductor structures including a germanium (Ge) layer deposited on silicon oxide utilizing an intermediate silicon germanium (SiGe) seed layer are also disclosed.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile