The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2021
Filed:
Jul. 19, 2019
Applicant:
Europlasma NV, Oudenaarde, BE;
Inventors:
Filip Legein, Keerbergen, BE;
Frank Ferdinandi, Linton, GB;
Assignee:
Europlasma NV, Oudenaarde, BE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C08F 2/52 (2006.01); B05D 1/00 (2006.01); H05K 3/28 (2006.01); B05D 5/08 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32532 (2013.01); B05D 1/62 (2013.01); C08F 2/52 (2013.01); H01J 37/32082 (2013.01); H01J 37/32403 (2013.01); H01J 37/32522 (2013.01); H01J 37/32541 (2013.01); H01J 37/32568 (2013.01); H05K 3/282 (2013.01); B05D 5/083 (2013.01); H05K 2203/095 (2013.01); Y10T 428/265 (2015.01);
Abstract
A plasma chamber (') for coating a substrate with a polymer layer, the plasma chamber includes a first electrode set (′) and a second electrode set (′), the first and second electrode sets are arranged either side of a sample chamber for receiving a substrate, wherein the first and second electrode sets include plural electrode layers (′) and wherein each electrode set includes plural radiofrequency electrode layers or plural ground electrode layers for coating polymer to each surface of a substrate.