The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2021
Filed:
Oct. 29, 2018
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Lidia Moioli, Albino, IT;
Pasqualina Fragneto, Burago di Molgora, IT;
Beatrice Rossi, Milan, IT;
Diego Carrera, Lodi, IT;
Giacomo Boracchi, Buccinasco, IT;
Mauro Fumagalli, Camparada, IT;
Elena Tagliabue, Caslino d'Erba, IT;
Paolo Giugni, Milan, IT;
Annalisa Aurigemma, Monza, IT;
STMICROELECTRONICS S.R.L., Agrate Brianza, IT;
Abstract
A device includes image generation circuitry and a convolutional neural network. The image generation circuitry, in operation, generates a binned representation of a wafer defect map (WDM). The convolutional-neural-network, in operation, generates and outputs an indication of a root cause of a defect associated with the WDM based on the binned representation of the WDM and a data-driven model associating WDMs with classes of a defined set of classes of wafer defects.