The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2021
Filed:
Jun. 10, 2019
Horiba, Ltd., Kyoto, JP;
Horiba Stec, Co., Ltd., Kyoto, JP;
Yoshitake Ando, Kyoto, JP;
Kotaro Takijiri, Kyoto, JP;
Yuki Tanaka, Kyoto, JP;
Yusuke Kanamaru, Kyoto, JP;
Emiko Nakagawa, Kyoto, JP;
HORIBA, Ltd., Kyoto, JP;
HORIBA STEC, Co., Ltd., Kyoto, JP;
Abstract
In order to prevent leakage, a fluid control apparatus is adapted to include: a valve provided in the flow path through which the fluid flows; a pressure sensor provided upstream of the valve; a flow rate sensor provided downstream of the pressure sensor; a reference pressure determination part that is inputted with a measured flow rate from the flow rate sensor and on the basis of a flow rate-pressure map, determines a reference pressure corresponding to the measured flow rate; a reference flow rate calculation part that calculates a reference flow rate so that the deviation between the reference pressure and a measured pressure measured by the pressure sensor decreases; and a valve control part that controls the opening of the valve so that the deviation between the reference flow rate and the measured flow rate decreases.