The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 16, 2021

Filed:

Jul. 07, 2020
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Akira Sano, Matsumoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/26 (2006.01); G02B 5/28 (2006.01); G01J 3/26 (2006.01); G02B 26/00 (2006.01);
U.S. Cl.
CPC ...
G02B 5/28 (2013.01); G01J 3/26 (2013.01); G02B 5/26 (2013.01); G02B 5/284 (2013.01); G02B 26/001 (2013.01);
Abstract

A wavelength variable interference filter includes: a first substrate on which a first reflection film is formed; and a second substrate that includes a movable portion on which a second reflection film facing the first reflection film is formed and a holding portion surrounding an outer circumference of the movable portion and holding the movable portion so that the movable portion is displaceable in a thickness direction of the second reflection film. The movable portion has long and short sides in a plan view. The holding portion includes a long-side holding portion formed along the long side and a short-side holding portion formed along the short side. The rigidity of the short-side holding portion is lower than the rigidity of the long-side holding portion.


Find Patent Forward Citations

Loading…