The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2021
Filed:
Aug. 20, 2018
Infineon Technologies Ag, Neubiberg, DE;
Benjamin Kollmitzer, Graz, AT;
Franz Michael Darrer, Graz, AT;
Philipp Greiner, Graz, AT;
Marcus Edward Hennecke, Graz, AT;
Walter Schuchter, Graz, AT;
Christoph Steiner, St. Margarethen, AT;
Infineon Technologies AG, Neubiberg, DE;
Abstract
Disclosed is an apparatus which has, among other things, a MEMS device with a first measurement arrangement for capturing a measurement variable (X) based on a physical variable, which has a useful variable component (N) and a first disturbance variable component (Z), and a second measurement arrangement for capturing a second disturbance variable component (Z). The apparatus furthermore has a disturbance compensation circuit which is configured to combine the second disturbance variable component (Z) and the measurement variable (X) with one another and to obtain a disturbance-compensated measurement variable (X). The MEMS device is arranged in a housing, wherein the MEMS device is in immediate mechanical contact with the housing by way of at least 50% of a MEMS device surface.