The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 16, 2021

Filed:

Nov. 15, 2017
Applicant:

Hitachi Automotive Systems, Ltd., Hitachinaka, JP;

Inventors:

Tsutomu Kono, Kawasaki, JP;

Yuuki Okamoto, Hitachinaka, JP;

Takeshi Morino, Hitachinaka, JP;

Keiji Hanzawa, Mito, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); G01F 15/16 (2006.01); G01F 1/684 (2006.01); G01F 1/692 (2006.01); H01L 23/495 (2006.01);
U.S. Cl.
CPC ...
G01F 15/16 (2013.01); G01F 1/684 (2013.01); G01F 1/6842 (2013.01); G01F 1/692 (2013.01); H01L 23/495 (2013.01); H01L 29/84 (2013.01); H01L 2224/45144 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48227 (2013.01); H01L 2224/49171 (2013.01); H01L 2224/73265 (2013.01);
Abstract

A flow sensor structure seals the surface of an electric control circuit and part of a semiconductor device via a manufacturing method that prevents occurrence of flash or chip crack when clamping the semiconductor device via a mold. The flow sensor structure includes a semiconductor device having an air flow sensing unit and a diaphragm, and a board or lead frame having an electric control circuit for controlling the semiconductor device, wherein a surface of the electric control circuit and part of a surface of the semiconductor device is covered with resin while having the air flow sensing unit portion exposed. The flow sensor structure may include surfaces of a resin mold, a board or a pre-mold component surrounding the semiconductor device that are continuously not in contact with three walls of the semiconductor device orthogonal to a side on which the air flow sensing unit portion is disposed.


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