The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2021
Filed:
Jun. 07, 2017
Applicant:
Georgia Tech Research Corporation, Atlanta, GA (US);
Inventors:
Assignee:
Georgia Tech Research Corporation, Atlanta, GA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5698 (2012.01); H03H 9/02 (2006.01); H03H 9/24 (2006.01); H03H 3/007 (2006.01);
U.S. Cl.
CPC ...
G01C 19/5698 (2013.01); H03H 3/007 (2013.01); H03H 3/0072 (2013.01); H03H 9/02259 (2013.01); H03H 9/02338 (2013.01); H03H 9/2431 (2013.01); H03H 2009/02346 (2013.01); H03H 2009/241 (2013.01);
Abstract
A bulk acoustic wave resonator apparatus includes a resonator member having an annulus shape, and at least one anchor structure coupling the resonator member to a substrate. A perimeter of the resonator member is at least partially defined by respective sidewalls that are slanted at an angle relative to a plane defined by a surface of the resonator member. The surface of the resonator member may be defined by a (100) crystal plane, and the angle of the respective sidewalls may be defined by a (111) crystal plane. Related fabrication methods are also discussed.