The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2021
Filed:
Sep. 14, 2018
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Ken Oikawa, Nishitokyo, JP;
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Abstract
A movable platen cooling apparatus includes: a compressor; a cold head that includes a cooling part; a refrigerator gas supply line that supplies a refrigerant gas from the compressor to the cold head; a refrigerator gas exhaust line that exhausts the refrigerant gas from the cold head to the compressor; a first gas inflow line that is connected to a first movable platen flow path and includes a heat exchange part thermally coupled to the cooling part; a first gas outflow line connected to the first movable platen flow path and merged with the refrigerator gas exhaust line; a second gas inflow line connected to a second movable platen flow path and disposed to be thermally non-coupled with the cooling part; and a second gas outflow line connected to the second movable platen flow path and merged with the refrigerator gas exhaust line.