The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2021
Filed:
Sep. 27, 2016
Applicant:
Analog Devices, Inc., Norwood, MA (US);
Inventors:
Assignee:
Analog Devices, Inc., Norwood, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02K 11/00 (2016.01); F03G 7/08 (2006.01); G01P 15/125 (2006.01); B81B 3/00 (2006.01); G01P 15/18 (2013.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
F03G 7/08 (2013.01); B81B 3/0037 (2013.01); G01P 15/125 (2013.01); B81B 2203/0163 (2013.01); G01P 15/18 (2013.01); G01P 2015/084 (2013.01);
Abstract
Microelectromechanical systems (MEMS) devices are described that include a proof mass movably connected to a substrate by accordion springs disposed on opposite sides of the proof mass, with a coupler coupling two of the accordion springs together. The coupler is a bar in some implementations, and may be rigid. The coupler therefore restricts the motion of the accordion springs relative to each other. In this manner, the motion of the proof mass may be restricted to preferred types and frequencies.