The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2021
Filed:
Mar. 23, 2016
Applicant:
Obducat Ab, Lund, SE;
Inventor:
Pirmin Muffler, Orsingen-Nenzingen, DE;
Assignee:
Obducat AB, Lund, SE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 3/12 (2006.01); B05C 13/00 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); B05C 11/08 (2006.01); B05D 1/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B05C 13/00 (2013.01); B05C 11/08 (2013.01); B05D 1/005 (2013.01); H01L 21/6838 (2013.01); H01L 21/68742 (2013.01); H01L 21/6715 (2013.01);
Abstract
A rotary plate for holding a substrate for a coating device, which rotary plate comprises a plurality of suction points, is intended to be characterized by an annular elevation, wherein a diameter of the annular elevation substantially corresponds to a diameter of the substrate.