The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 09, 2021

Filed:

Mar. 14, 2018
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Takayuki Yonemura, Suwa, JP;

Chikara Kojima, Matsumoto, JP;

Xiaoxing Wang, Chino, JP;

Tetsuya Isshiki, Shiojiri, JP;

Yasuhiro Itayama, Kai, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H01L 41/09 (2006.01); H01L 41/047 (2006.01); C01G 25/00 (2006.01); A61B 8/00 (2006.01); A61B 8/14 (2006.01); B41J 2/14 (2006.01); B41J 2/16 (2006.01); G01N 29/24 (2006.01); H01L 41/04 (2006.01); H01L 41/08 (2006.01); B06B 1/06 (2006.01); H01L 41/47 (2013.01);
U.S. Cl.
CPC ...
H01L 41/1876 (2013.01); A61B 8/14 (2013.01); A61B 8/4444 (2013.01); A61B 8/4483 (2013.01); A61B 8/461 (2013.01); B06B 1/0692 (2013.01); B41J 2/14201 (2013.01); B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/1623 (2013.01); B41J 2/1628 (2013.01); B41J 2/1629 (2013.01); B41J 2/1631 (2013.01); B41J 2/1632 (2013.01); B41J 2/1634 (2013.01); B41J 2/1635 (2013.01); B41J 2/1642 (2013.01); B41J 2/1645 (2013.01); B41J 2/1646 (2013.01); C01G 25/006 (2013.01); G01N 29/245 (2013.01); H01L 41/042 (2013.01); H01L 41/0475 (2013.01); H01L 41/0805 (2013.01); H01L 41/0973 (2013.01); A61B 8/4427 (2013.01); B06B 1/0666 (2013.01); B41J 2002/14258 (2013.01); B41J 2202/03 (2013.01); C01P 2002/34 (2013.01); C01P 2006/40 (2013.01);
Abstract

A piezoelectric element has a diaphragm, a first electrode on the diaphragm, a piezoelectric layer on the first electrode, and a second electrode on the piezoelectric layer. The piezoelectric layer is a stack of multiple piezoelectric films and is made of a perovskite composite oxide containing lead, zirconium, and titanium and represented by the general formula ABO, with the molar ratio of the A-site to the B-site (A/B) in the perovskite composite oxide being 1.14 or more and 1.22 or less. In current-time curve measurement, the activation energy calculated from relaxation current using an Arrhenius plot is 0.6 [eV] or less. The relaxation current is the amount of current at the time at which a downward trend in current turns upward.


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