The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2021
Filed:
Aug. 16, 2017
Applicant:
Nissin Ion Equipment Co., Ltd., Koka, JP;
Inventor:
Masakazu Adachi, Koka, JP;
Assignee:
NISSIN ION EQUIPMENT CO., LTD., Koka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/68 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67109 (2013.01); H01L 21/67213 (2013.01); H01L 21/67248 (2013.01); H01L 21/67703 (2013.01); H01L 21/683 (2013.01); H01L 21/68707 (2013.01);
Abstract
A heating device is provided. The heating device includes a conveyance member that conveys a substrate between a heating position and a non-heating position, a support member that is provided on the conveyance member and that supports the substrate, a heater provided at the heating position and operable to heat a first surface of the substrate, and a heat reflecting plate attached to the conveyance member in facing relation to a second surface of the substrate opposite to the first surface.