The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 09, 2021

Filed:

Apr. 28, 2017
Applicant:

Kasuga Denki, Inc, Kawasaki, JP;

Inventors:

Satoru Ogiso, Kawasaki, JP;

Takao Morishita, Kawasaki, JP;

Tatsuya Inamura, Kawasaki, JP;

Junya Yoshida, Kawasaki, JP;

Satoshi Sugimura, Kawasaki, JP;

Assignee:

KASUGA DENKI, INC., Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); B29C 59/12 (2006.01); B29C 71/04 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3244 (2013.01); B29C 59/12 (2013.01); B29C 71/04 (2013.01); H01J 37/32073 (2013.01); H01J 37/32541 (2013.01); H01J 37/32568 (2013.01); H01J 2237/33 (2013.01);
Abstract

A discharge electrode E in an electrode chamber C is formed of a pair of electrode membersandhaving lengths equal to or greater than a width of a film F. Also, the pair of electrode membersandare disposed facing each other so as to sandwich a support memberthere-between, which has nearly the same length as to electrode members; a gap is formed in a section in which the pair of electrode membersandface each other; and this gap is open at a tip of the discharge electrode so as to serve as a gas pathway. Meanwhile, in the aforementioned support member, a plurality of gas guiding holesare formed in a longitudinal direction thereof, and the gas guiding holes are in communication with a gas supplying system.


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