The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2021
Filed:
Sep. 06, 2019
Applicant:
Toshiba Memory Corporation, Minato-ku, JP;
Inventors:
Assignee:
TOSHIBA MEMORY CORPORATION, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/285 (2006.01); H01J 37/244 (2006.01); H01J 37/12 (2006.01); H01J 37/141 (2006.01); H01J 37/153 (2006.01);
U.S. Cl.
CPC ...
H01J 37/285 (2013.01); H01J 37/12 (2013.01); H01J 37/141 (2013.01); H01J 37/153 (2013.01); H01J 37/244 (2013.01); H01J 2237/153 (2013.01); H01J 2237/226 (2013.01); H01J 2237/2446 (2013.01); H01J 2237/24495 (2013.01); H01J 2237/24585 (2013.01); H01J 2237/2611 (2013.01); H01J 2237/2852 (2013.01); H01J 2237/2855 (2013.01);
Abstract
According to one embodiment, an atom probe inspection device includes one or more processors configured to change a two-dimensional position of a detected ion, detect two-dimensional position information of the ion and a flying time of the ion, identify a type of an element of the ion, generate first information under a first condition and second information under a second condition, and generate a reconstruction image of the sample from the first information and the second information.