The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 09, 2021

Filed:

Nov. 29, 2018
Applicant:

Nikon Corporation, Tokyo, JP;

Inventor:

Naoki Fukutake, Tokyo, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/44 (2006.01); G01N 21/27 (2006.01); G01N 21/64 (2006.01); G01N 21/65 (2006.01); G02B 21/00 (2006.01);
U.S. Cl.
CPC ...
G01N 21/27 (2013.01); G01N 21/64 (2013.01); G01N 21/65 (2013.01); G02B 21/00 (2013.01);
Abstract

An observation apparatus in this embodiment includes a light source configured to irradiate an observation target with light, and a processing unit configured to generate an image based on Rayleigh scattered light derived from χincluded in light obtained from the observation target.


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