The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2021
Filed:
May. 29, 2020
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Tomoyuki Kamakura, Matsumoto, JP;
Yusuke Matsuzawa, Chino, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 3/02 (2006.01); H03H 9/05 (2006.01); H03H 9/19 (2006.01); H03B 5/32 (2006.01); H03H 9/10 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02125 (2013.01); H03B 5/32 (2013.01); H03H 3/02 (2013.01); H03H 9/0519 (2013.01); H03H 9/1021 (2013.01); H03H 9/19 (2013.01); H03H 2003/022 (2013.01);
Abstract
A vibrator device includes a silicon substrate having a through hole, a first terminal placed on a first surface of the silicon substrate, a second terminal placed on a second surface opposite to the first surface of the silicon substrate, a wire passing the through hole and electrically coupling the first terminal and the second terminal, a resin layer placed between the wire and an inner wall defining the through hole, a silicon oxide layer placed between the resin layer and the inner wall, and a vibrator element bonded to the first terminal.