The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 02, 2021

Filed:

Jul. 22, 2019
Applicant:

Toshiba Memory Corporation, Tokyo, JP;

Inventors:

Natsuki Fukuda, Yokkaichi Mie, JP;

Satoshi Nagashima, Yokkaichi Mie, JP;

Tetsu Morooka, Yokkaichi Mie, JP;

Noritaka Ishihara, Yokkaichi Mie, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11524 (2017.01); H01L 27/11556 (2017.01); H01L 27/1157 (2017.01); H01L 27/11582 (2017.01); H01L 29/06 (2006.01); H01L 21/311 (2006.01); H01L 21/764 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11524 (2013.01); H01L 21/31111 (2013.01); H01L 21/31144 (2013.01); H01L 21/764 (2013.01); H01L 27/1157 (2013.01); H01L 27/11556 (2013.01); H01L 27/11582 (2013.01); H01L 29/0649 (2013.01); H01L 29/40114 (2019.08); H01L 29/40117 (2019.08);
Abstract

According to one embodiment, a semiconductor storage device includes a first charge storage part, a first insulating part, a second charge storage part, a second insulating part, a first select transistor, and a hollow part. The first charge storage part is at a first position separated from a surface of a substrate by a first distance in a third direction. The first select transistor is at a second position separated from the surface of the substrate by a second distance in the third direction. The second distance is greater than the first distance. The hollow part is up to a third position in the third direction separated from the surface of the substrate by a third distance in the third direction. The third distance is greater than or equal to the first distance and shorter than or equal to the second distance.


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