The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 02, 2021

Filed:

Sep. 01, 2017
Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Ravi Joshi, Villach, AT;

Juergen Steinbrenner, Noetsch, AT;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/528 (2006.01); H01L 23/532 (2006.01); H01L 21/768 (2006.01); H01L 21/02 (2006.01); H01L 21/285 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
H01L 23/528 (2013.01); H01L 21/02115 (2013.01); H01L 21/02527 (2013.01); H01L 21/02606 (2013.01); H01L 21/28568 (2013.01); H01L 21/31138 (2013.01); H01L 21/76801 (2013.01); H01L 21/76829 (2013.01); H01L 21/76871 (2013.01); H01L 21/76877 (2013.01); H01L 21/76885 (2013.01); H01L 23/5329 (2013.01); H01L 23/53209 (2013.01); H01L 23/53223 (2013.01); H01L 23/53228 (2013.01); H01L 23/53266 (2013.01); H01L 21/02645 (2013.01); H01L 21/7682 (2013.01); H01L 2221/1047 (2013.01); H01L 2924/0002 (2013.01);
Abstract

In various embodiments a method for manufacturing a metallization layer on a substrate is provided, wherein the method may include providing a structured layer of a catalyst material on the substrate, the catalyst material may include a first layer of material arranged over the substrate and a second layer of material arranged over the first layer of material, wherein the structured layer of catalyst material having a first set of regions including the catalyst material over the substrate and a second set of regions free of the catalyst material over the substrate, and forming a plurality of groups of nanotubes over the substrate, each group of the plurality of groups of nanotubes includes a plurality of nanotubes formed over a respective region in the first set of regions.


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