The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2021
Filed:
Feb. 27, 2017
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventor:
Ryo Muramoto, Kyoto, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67184 (2013.01); H01L 21/67167 (2013.01); H01L 21/67196 (2013.01); H01L 21/67745 (2013.01); H01L 21/67748 (2013.01);
Abstract
A first transfer robot carries a substrate into and out of a container. A second transfer robot receives and delivers the substrate from and to the first transfer robot, and carries the substrate into and out of a first processing portion through a first exit/entrance port. A third transfer robot receives and delivers the substrate from and to the second transfer robot, carries the substrate into and out of a second processing portion through a second exit/entrance port, and carries the substrate into and out of a third processing portion through a third exit/entrance port.