The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2021
Filed:
Sep. 11, 2019
Kabushiki Kaisha Toshiba, Tokyo, JP;
Kei Masunishi, Kawasaki Kanagawa, JP;
Naofumi Nakamura, Tokyo, JP;
Hiroaki Yamazaki, Yokohama Kanagawa, JP;
Tomohiro Saito, Yokohama Kanagawa, JP;
Fumitaka Ishibashi, Kawasaki Kanagawa, JP;
Yoshihiko Kurui, Chigasaki Kanagawa, JP;
Tomohiko Nagata, Yokohama Kanagawa, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
According to one embodiment, a pressure sensor is disclosed. The pressure sensor includes a substrate, and a first capacitor element. The first capacitor element includes a lower electrode provided on the substrate, an upper electrode disposed above the lower electrode, and a film provided over the lower electrode and upper electrode. The lower electrode and the upper electrode are between the substrate and the film. An absolute value of an amount of change in an electrostatic capacitance between the lower electrode and the upper electrode with respect to unit change in an ambient temperature of the first capacitor element is substantially zero.