The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2021
Filed:
Oct. 23, 2018
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Yuxing Zhang, Santa Clara, CA (US);
Daniel Hwung, Los Gatos, CA (US);
Ashutosh Agarwal, San Jose, CA (US);
Kaushik Alayavalli, Sunnyvale, CA (US);
Kalyanjit Ghosh, Pleasanton, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); H01J 37/32 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45565 (2013.01); C23C 16/4401 (2013.01); C23C 16/4409 (2013.01); C23C 16/4557 (2013.01); C23C 16/45572 (2013.01); H01J 37/3244 (2013.01);
Abstract
Embodiments herein relate to gas distribution apparatuses. In one aspect, the disclosure herein relates to a showerhead including a body having an upper surface and a lower surface. A thermal choke is disposed adjacent a perimeter of the body. The thermal choke includes a plurality of interleaved channels. One or more apertures are disposed between the upper surface and the lower surface of the body.