The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2021
Filed:
Jan. 20, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Benjamin Schmiege, Santa Clara, CA (US);
Jeffrey W. Anthis, San Jose, CA (US);
David Thompson, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 15/00 (2006.01); C23C 16/34 (2006.01); C23C 16/50 (2006.01); C23C 16/455 (2006.01); C23C 16/40 (2006.01); C23C 16/18 (2006.01);
U.S. Cl.
CPC ...
C07F 15/0053 (2013.01); C07F 15/0046 (2013.01); C23C 16/18 (2013.01); C23C 16/34 (2013.01); C23C 16/405 (2013.01); C23C 16/45536 (2013.01); C23C 16/45553 (2013.01); C23C 16/50 (2013.01);
Abstract
Metal coordination complexes comprising a metal atom coordinated to at least one diazabutadiene ligand having a structure represented by: where each R is independently a C1-C13 alkyl or aryl group and each R' is independently H, C1-C10 alkyl or aryl group are described. Processing methods using the metal coordination complexes are also described.