The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2021
Filed:
Sep. 10, 2018
Xaar Technology Limited, Cambridge, GB;
Bruce Scott, Cambridge, GB;
XAAR TECHNOLOGY LIMITED, Cambridge, GB;
Abstract
A method for the manufacture of a microelectromechanical systems (MEMS) device comprising bonded components which together define a chamber in the device, which method comprises forming a bonding material layer on a surface of a first component, patterning the bonding material layer and, optionally, the first component and bonding a second component to the patterned bonding material layer and first component. The forming of the bonding material layer comprises partially curing a curable material and the bonding of the second component to the patterned bonding material layer and the first component comprises fully curing the partially cured material.