The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2021
Filed:
Jan. 15, 2019
Applicant:
Alliance for Sustainable Energy, Llc, Golden, CO (US);
Inventors:
Kevin Louis Schulte, Denver, CO (US);
Aaron Joseph Ptak, Littleton, CO (US);
John David Simon, Littleton, CO (US);
Assignee:
Alliance for Sustainable Energy, LLC, Golden, CO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/18 (2006.01); C30B 25/02 (2006.01); C23C 16/30 (2006.01); C30B 29/42 (2006.01); C30B 25/14 (2006.01); C30B 29/40 (2006.01); C30B 25/16 (2006.01); H01L 31/0735 (2012.01);
U.S. Cl.
CPC ...
H01L 31/1844 (2013.01); C23C 16/301 (2013.01); C30B 25/02 (2013.01); C30B 25/14 (2013.01); C30B 25/165 (2013.01); C30B 29/40 (2013.01); C30B 29/42 (2013.01); H01L 31/184 (2013.01); H01L 31/0735 (2013.01);
Abstract
Presented herein are reactors for growing or depositing semiconductor films or devices. The reactors disclosed may be used for the production of III-V materials grown by hydride vapor phase epitaxy (HVPE).