The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 26, 2021

Filed:

Jul. 10, 2018
Applicant:

Samsung Display Co., Ltd., Yongin-si, KR;

Inventors:

Minwoo Lee, Seoul, KR;

Byunghoon Kang, Hwaseong-si, KR;

Heekyun Shin, Incheon, KR;

Seungjun Moon, Cheonan-si, KR;

Woojin Cho, Yongin-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Yongin-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/12 (2006.01); H01L 27/32 (2006.01); H01L 51/52 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1218 (2013.01); H01L 27/1262 (2013.01); H01L 27/1266 (2013.01); H01L 27/3225 (2013.01); H01L 27/3262 (2013.01); H01L 51/5253 (2013.01); H01L 51/0097 (2013.01); H01L 2227/326 (2013.01);
Abstract

A system of forming a debonding layer includes a debonding layer forming device configured to form a coating layer by coating a graphene oxide layer on a support substrate. The debonding layer forming device is configured to form a debonding layer by heat-treating the coating layer. An optical measuring device is configured to classify the support substrate into a plurality of cell areas. The optical measuring device is configured to measure a thickness of at least one of the coating layer in at least one cell area of the plurality of cell areas.


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