The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 26, 2021

Filed:

May. 08, 2018
Applicant:

Ams Sensors Singapore Pte. Ltd., Singapore, SG;

Inventor:

Hartmut Rudmann, Jona, CH;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01); H01L 23/544 (2006.01); H01L 25/16 (2006.01); H01L 25/075 (2006.01); H01L 33/58 (2010.01);
U.S. Cl.
CPC ...
H01L 25/167 (2013.01); H01L 25/0753 (2013.01); H01L 25/162 (2013.01); H01L 27/1469 (2013.01); H01L 27/14618 (2013.01); H01L 27/14625 (2013.01); H01L 27/14634 (2013.01); H01L 27/14685 (2013.01); H01L 33/58 (2013.01); H01L 23/544 (2013.01); H01L 2223/54426 (2013.01); H01L 2224/16225 (2013.01); H01L 2224/48227 (2013.01); H01L 2924/12044 (2013.01); H01L 2924/15311 (2013.01); H01L 2933/0058 (2013.01);
Abstract

A method of forming a wafer stack includes providing a sub-stack comprising a first wafer and a second wafer. The sub-stack includes a first thermally-curable adhesive at an interface between the upper surface of the first wafer and the lower surface of the second wafer. A third wafer is placed on the upper surface of the second wafer. A second thermally-curable adhesive is present at an interface between the upper surface of the second wafer and the lower surface of the third wafer. Ultra-violet (UV) radiation is provided in a direction of the upper surface of the third wafer to cure a UV-curable adhesive in openings in the second wafer and in contact with portions of the third wafer so as to bond the third wafer to the sub-stack at discrete locations. Subsequently, the third wafer and the sub-stack are heated so to cure the first and second thermally-curable adhesives.


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