The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2021
Filed:
Nov. 27, 2018
Applicant:
Brooks Automation, Inc., Chelmsford, MA (US);
Inventors:
Antonio F. Pietrantonio, Derry, NH (US);
Anthony Chesna, Saugus, MA (US);
Hakan Elmali, Groton, MA (US);
Ulysses Gilchrist, San Jose, CA (US);
Assignee:
Brooks Automation, Inc., Chelmsford, MA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/677 (2006.01); B25J 9/04 (2006.01); H01L 21/687 (2006.01); B25J 18/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); B25J 9/042 (2013.01); B25J 9/043 (2013.01); B25J 18/00 (2013.01); H01L 21/677 (2013.01); H01L 21/68707 (2013.01); Y10S 901/15 (2013.01); Y10S 901/27 (2013.01); Y10T 74/20305 (2015.01);
Abstract
A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.