The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2021
Filed:
Jan. 22, 2018
Applicant:
Nanya Technology Corporation, New Taipei, TW;
Inventor:
Shih-Fan Kuan, Taoyuan, TW;
Assignee:
NANYA TECHNOLOGY CORPORATION, New Taipei, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67389 (2013.01); H01L 21/67393 (2013.01); H01L 21/67772 (2013.01);
Abstract
A front opening unified pod (FOUP) includes a container, a plurality of wafer slots, at least one inlet pipe, and at least one outlet pipe. The wafer slots, the inlet pipe, and the outlet pipe are disposed in the container. The inlet pipe has a plurality of exhale openings arranged along the inlet pipe. The outlet pipe has a plurality of inhale openings arranged along the outlet pipe.