The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 26, 2021

Filed:

Feb. 28, 2019
Applicant:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventors:

Hiroshi Ohno, Tokyo, JP;

Takahiro Kamikawa, Tokyo, JP;

Takehiro Hato, Tokyo, JP;

Hiroya Kano, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F21V 8/00 (2006.01); G01N 21/88 (2006.01); G07D 7/121 (2016.01); G07D 5/00 (2006.01);
U.S. Cl.
CPC ...
G02B 6/0046 (2013.01); G02B 6/0055 (2013.01); G02B 6/0068 (2013.01); G02B 6/0085 (2013.01); G01N 21/8806 (2013.01); G07D 5/005 (2013.01); G07D 7/121 (2013.01); G07D 2205/00 (2013.01); G07D 2207/00 (2013.01);
Abstract

According to one embodiment, an optical inspection apparatus including: an imaging optical system; one or more light sources; a light guide which extends cylindrically along an optical axis of the imaging optical system and whose end face is opposed to the one or more light sources; a total reflecting surface formed on an inner surface of the light guide to totally internally reflect light struck into the light guide from the end face; a mirror surface formed on an outer surface of the light guide to reflect light struck into the light guide from the one or more light sources, toward the inspection target; and a transmission surface formed on the inner surface of the light guide to transmit the light reflected by the mirror surface, toward the inspection target.


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