The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 26, 2021

Filed:

Apr. 19, 2018
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Hisao Osawa, Tokyo, JP;

Fumihiro Dake, Tokyo, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/06 (2006.01); G01N 21/64 (2006.01); G02B 27/58 (2006.01); G02B 21/08 (2006.01); G02B 21/36 (2006.01); G02B 21/00 (2006.01); G02B 21/16 (2006.01);
U.S. Cl.
CPC ...
G01N 21/6458 (2013.01); G02B 21/0092 (2013.01); G02B 21/08 (2013.01); G02B 21/082 (2013.01); G02B 21/16 (2013.01); G02B 21/367 (2013.01); G02B 27/58 (2013.01);
Abstract

A structured illumination microscope includes: a brancher that includes a first substrate on which a plurality of pixel electrodes are provided; a second substrate opposed to the first substrate; and a ferroelectric liquid crystal disposed between the first substrate and the second substrate, and branches light from a light source into diffracted light beams; an illumination optical system that illuminates a sample with interference fringes formed by at least some of the diffracted light beams; an imaging device that forms an image of the sample irradiated with the interference fringes; a demodulator; and a controller that controls a direction and a phase of the interference fringes. In one frame period during which the imaging device takes the image, the controller applies a first voltage pattern and a second voltage pattern obtained by inverting the first voltage pattern to at least some of the pixel electrodes.


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