The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2021
Filed:
Jan. 05, 2017
Applicant:
Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v., Munich, DE;
Inventors:
Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/20 (2006.01); G01J 5/34 (2006.01); G01J 5/02 (2006.01); G01J 5/04 (2006.01); G01J 5/08 (2006.01); G01J 5/28 (2006.01);
U.S. Cl.
CPC ...
G01J 5/0235 (2013.01); G01J 5/023 (2013.01); G01J 5/024 (2013.01); G01J 5/0225 (2013.01); G01J 5/046 (2013.01); G01J 5/0809 (2013.01); G01J 5/20 (2013.01); G01J 5/34 (2013.01); G01J 5/28 (2013.01);
Abstract
A radiation detector includes a substrate and a membrane suspended above the substrate by spacers, wherein the spacers electrically contact a radiation sensor formed in the membrane and thermally insulate the membrane from the substrate.