The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2021
Filed:
May. 27, 2016
Asm Ip Holding B.v., Almere, NL;
John Shugrue, Phoenix, AZ (US);
Lucian C. Jdira, Nieuw Vennep, NL;
Chris G. M. de Ridder, Almere, NL;
ASM IP Holding B.V., Almere, NL;
Abstract
A spatial atomic layer deposition apparatus (), including a showerhead () with a showerhead side () having a center, a central area and a circumferential area. The apparatus also includes a susceptor () having a substrate support side that extends parallel to and of opposite the showerhead side forming a gap. The susceptor and the showerhead are rotatable relative to each other around an axis of rotation. The apparatus has a plurality of switchable showerhead sections. The apparatus also includes a plurality of multi-way valve assemblies. Each switchable showerhead section is fluidly connected with one of the plurality of multi-way valve assemblies, so as to fluidly connect a selected one of a plurality of different gas sources with that switchable showerhead section.