The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2021
Filed:
May. 16, 2018
Applicants:
Boe Technology Group Co., Ltd., Beijing, CN;
Chengdu Boe Optoelectronics Technology Co., Ltd., Sichuan, CN;
Assignees:
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., Chengdu, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B23K 26/00 (2014.01); H01L 21/02 (2006.01); B23K 26/14 (2014.01); B23K 26/354 (2014.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); B23K 26/0006 (2013.01); B23K 26/14 (2013.01); B23K 26/354 (2015.10); H01L 21/02532 (2013.01); H01L 21/02595 (2013.01); H01L 21/02686 (2013.01); H01L 21/02592 (2013.01); H01L 21/02675 (2013.01);
Abstract
An excimer laser annealing apparatus is provided. The excimer laser annealing apparatus includes: a laser output channel, at least one first intake pipe and at least one second intake pipe, the laser output channel includes two end faces facing to each other and a side face connected with both of the two end faces; the at least one first intake pipe is located on the side face; and the at least one second intake pipe is located on at least one of the two end faces.