The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2021
Filed:
Sep. 24, 2018
Lam Research Corporation, Fremont, CA (US);
Kapil Sawlani, San Jose, CA (US);
Gary B. Lind, Penn Valley, CA (US);
Michal Danek, Cupertino, CA (US);
Ronald Powell, Portola Valley, CA (US);
Michael Rumer, Santa Clara, CA (US);
Kaihan Ashtiani, Cupertino, CA (US);
LAM RESEARCH CORPORATION, Fremont, CA (US);
Abstract
A system includes a camera mounted external to and adjacent to a window of a processing chamber configured to process semiconductor substrates. The window allows the camera to view a component in the processing chamber. The camera is configured to generate a video signal indicative of a status of the component during a process being performed in the processing chamber. The system further includes a controller coupled to the processing chamber. The controller is configured to control the camera, process the video signal from the camera, determine the status of the component based on the processing of the video signal, and determine whether to terminate the process based on the status of the component.