The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2021
Filed:
Dec. 14, 2017
Industrial Technology Research Institute, Hsinchu, TW;
Yu-Lin Hsu, Tainan, TW;
Chien-Hung Lin, Changhua County, TW;
Kuo-Hsin Huang, Hsinchu County, TW;
Chao-Feng Sung, Hsinchu, TW;
Chih-Ming Lai, Changhua County, TW;
Hung-Yi Chang, Taichung, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
An evaporation apparatus including a material source, a chamber, a passageway, and a heating component is provided. The material source is configured to provide a deposition material. The chamber includes a manifold. The passageway is configured to be connected to the material source and the manifold. The heating component is disposed in at least a portion of the passageway and configured to heat the deposition material. A calibration method of the evaporation apparatus is also provided.