The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 19, 2021

Filed:

Apr. 10, 2018
Applicant:

Nissan Chemical Corporation, Tokyo, JP;

Inventors:

Hikaru Tokunaga, Toyama, JP;

Yuto Hashimoto, Toyama, JP;

Keisuke Hashimoto, Toyama, JP;

Rikimaru Sakamoto, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09D 5/00 (2006.01); C09D 7/63 (2018.01); C09D 133/06 (2006.01); C09D 133/14 (2006.01); C09D 161/18 (2006.01); C09D 175/14 (2006.01); C09D 179/02 (2006.01); C09K 13/00 (2006.01); G03F 7/11 (2006.01); H01L 21/02 (2006.01); H01L 21/027 (2006.01); H01L 21/311 (2006.01); C08K 5/053 (2006.01); C08K 5/13 (2006.01); C08K 5/132 (2006.01); G03F 7/16 (2006.01);
U.S. Cl.
CPC ...
C09D 5/00 (2013.01); C09D 7/63 (2018.01); C09D 133/066 (2013.01); C09D 133/14 (2013.01); C09D 161/18 (2013.01); C09D 175/14 (2013.01); C09D 179/02 (2013.01); C09K 13/00 (2013.01); G03F 7/11 (2013.01); H01L 21/0273 (2013.01); H01L 21/02118 (2013.01); H01L 21/31138 (2013.01); H01L 21/31144 (2013.01); C08K 5/053 (2013.01); C08K 5/13 (2013.01); C08K 5/132 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01);
Abstract

A composition for forming protective film against aqueous hydrogen peroxide solution, composition including resin; compound of following Formula (1a), (1b), or (1c): (wherein X is carbonyl group or methylene group; 1 and m are each independently integer of 0-5 to satisfy relation: 3≤1+m≤10; n is integer of 2-5; u and v are each independently integer of 0-4 to satisfy relation: 3≤u+v≤8; R-Rare each independently hydrogen atom, hydroxy group, Chydrocarbon group, or Caryl group; when R-Rare each the Chydrocarbon group; and j and k are each independently 0 or 1); crosslinking agent and catalyst; and solvent, wherein amount of compound of Formula (1a), (1b), or (1c) is at most 80% by mass relative to amount of resin, and amount of crosslinking agent is 5%-40% by mass relative to amount of resin.


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