The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2021
Filed:
Jan. 21, 2019
Applicant:
Topcon Corporation, Tokyo, JP;
Inventors:
Assignee:
TOPCON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
A61B 3/10 (2006.01); G01B 11/06 (2006.01); G06T 7/00 (2017.01); G06T 11/60 (2006.01); A61B 3/14 (2006.01); A61B 5/00 (2006.01); A61B 5/107 (2006.01);
U.S. Cl.
CPC ...
A61B 3/101 (2013.01); A61B 3/1005 (2013.01); A61B 3/14 (2013.01); A61B 5/0075 (2013.01); G01B 11/06 (2013.01); G01B 11/0633 (2013.01); G06T 7/0012 (2013.01); G06T 11/60 (2013.01); A61B 5/1075 (2013.01); G06T 2207/30041 (2013.01);
Abstract
A method for measuring layer thicknesses of a multi-layer structure includes generating first and second 2D images of the structure, each image being generated by measuring an intensity of a reflection of incident lights, from different discrete narrow spectral bands, on the structure. Thicknesses for at least one layer of the structure are then determined based on the measured reflection intensities at those locations.