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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10892345 B1

PDFFull Text
Date of Patent:
Jan. 12, 2021

Filed:

May. 31, 2018

Semiconductor device

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Sunmin Moon, Yongin-si, KR;

Young-Lim Park, Anyang-si, KR;

Kyuho Cho, Hwaseong-si, KR;

Hanjin Lim, Seoul, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD.;

Attorney:

Renaissance IP Law Group LLP

Primary Examiner:

Bo B Jang

Int. Cl.
CPC ...
H01L 29/51 (2006.01); H01L 21/762 (2006.01); H01L 29/15 (2006.01); H01L 29/06 (2006.01); H01L 27/108 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 29/517 (2013.01); H01L 21/76221 (2013.01); H01L 27/10852 (2013.01); H01L 28/90 (2013.01); H01L 29/0649 (2013.01); H01L 29/152 (2013.01); H01L 29/518 (2013.01);
Abstract

Disclosed is a semiconductor device including a bottom electrode, a dielectric layer, and a top electrode that are sequentially disposed on a substrate. The dielectric layer includes a hafnium oxide layer including hafnium oxide having a tetragonal crystal structure, and an oxidation seed layer including an oxidation seed material. The oxidation seed material has a lattice constant having a lattice mismatch of 6% or less with one of a horizontal lattice constant and a vertical lattice constant of the hafnium oxide having the tetragonal crystal structure.

Find Patent Forward Citations

Moon, Sunmin. (2021). Semiconductor device (U.S. Patent No. 10892345). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10892345

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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