The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2021
Filed:
Sep. 10, 2018
Applicant:
Toshiba Memory Corporation, Minato-ku, JP;
Inventor:
Keiichi Niwa, Yokkaichi, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
B23K 1/00 (2006.01); H01L 23/00 (2006.01); B23K 1/20 (2006.01); B23K 101/40 (2006.01); B23K 3/08 (2006.01);
U.S. Cl.
CPC ...
H01L 24/11 (2013.01); B23K 1/203 (2013.01); H01L 24/05 (2013.01); H01L 24/742 (2013.01); B23K 3/082 (2013.01); B23K 2101/40 (2018.08); H01L 2224/022 (2013.01); H01L 2224/05647 (2013.01); H01L 2224/117 (2013.01); H01L 2224/119 (2013.01); H01L 2224/742 (2013.01);
Abstract
A semiconductor fabrication apparatus has a transfer plate having a plurality of transfer pins to transfer a flux onto a plurality of lands on a semiconductor substrate, a holder movable with the transfer plate, to hold the transfer plate, a positioning mechanism to perform positioning of the holder so that the plurality of lands and the respective transfer pins contact each other; and a pitch adjuster to adjust a pitch of at least part of the plurality of transfer pins.