The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2021
Filed:
May. 16, 2019
Canon Kabushiki Kaisha, Tokyo, JP;
Mitsuhiro Masuda, Utsunomiya, JP;
Kenji Yamamoto, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
A substrate processing system having a plurality of substrate processing apparatuses, a host control apparatus, and a management apparatus is provided. The management apparatus determines a substrate processing apparatus that needs maintenance processing, based on operation information collected from each of the substrate processing apparatuses, and notifies a determination result to the substrate processing apparatus determined to need the maintenance processing. Each of the substrate processing apparatuses transmits information for executing the maintenance processing to the host control apparatuses upon receiving the determination result. The host control apparatus monitors an operation state of each of the substrate processing apparatuses, and, based on the operation state of the substrate processing apparatus that transmitted the information for executing the maintenance processing, controls a timing of performance of the maintenance processing with respect to the substrate processing apparatus.