The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2021
Filed:
Mar. 05, 2020
Applicant:
Viking Tech Corporation, Hsinchu County, TW;
Inventors:
Cheng-Chung Chiu, Hsinchu County, TW;
Chi-Yu Lu, Hsinchu County, TW;
Assignee:
VIKING TECH CORPORATION, Hsinchu County, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01C 7/00 (2006.01); H01C 17/075 (2006.01); H01C 1/142 (2006.01);
U.S. Cl.
CPC ...
H01C 7/006 (2013.01); H01C 1/142 (2013.01); H01C 17/075 (2013.01);
Abstract
A thin film resistor element is provided with a tantalum nitride (TaN) layer on an upper surface of a substrate, a tantalum pentoxide (TaO) layer disposed on the tantalum nitride layer, and two electrode layers separately disposed on the tantalum pentoxide layer or on both ends of the tantalum nitride layer and the tantalum pentoxide layer. The thin film resistor element of the present invention can reduce the oxidation rate of the resistor layer to maintain a constant resistance value at high temperatures generated during use.