The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2021
Filed:
Jul. 17, 2018
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Yoonjung Jang, Pohang-si, KR;
Sooyoung Kim, Seongnam-si, KR;
Boodeuk Kim, Suwon-si, KR;
Soojin Lee, Anyang-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/40 (2006.01); G01N 21/64 (2006.01); G03F 7/32 (2006.01); C08B 37/16 (2006.01); G03F 7/16 (2006.01); C08L 5/16 (2006.01);
U.S. Cl.
CPC ...
G03F 7/40 (2013.01); C08B 37/0015 (2013.01); C08L 5/16 (2013.01); G01N 21/643 (2013.01); G03F 7/16 (2013.01); G03F 7/327 (2013.01); G01N 2021/6439 (2013.01);
Abstract
Provided are a material for detecting photoresist and a method for detecting photoresist using the same. The material for detecting photoresist may include a macrocyclic molecule having a hollow structure and a fluorescent substance which is labeled on the macrocyclic molecule, and the macrocyclic molecule is at least one of cyclodexrin, cucurbituril, calixarene, pillararene and catenane.