The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 12, 2021

Filed:

Feb. 12, 2019
Applicant:

The Trustees of the Stevens Institute of Technology, Hoboken, NJ (US);

Inventors:

Eui-Hyeok Yang, Fort Lee, NJ (US);

Xiaotian Wang, Secaucus, NJ (US);

Kyungnam Kang, Edgewater, NJ (US);

Siwei Chen, Jersey City, NJ (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09J 7/00 (2018.01); C09J 5/00 (2006.01); C23C 16/00 (2006.01); C30B 25/00 (2006.01); C30B 29/00 (2006.01); G03F 7/00 (2006.01); H01L 21/00 (2006.01); C30B 25/04 (2006.01); H01L 21/02 (2006.01); H01L 21/78 (2006.01); H01L 21/683 (2006.01); C23C 16/04 (2006.01); C23C 16/30 (2006.01); C30B 25/18 (2006.01); C30B 29/46 (2006.01); C09J 5/06 (2006.01); C09J 7/35 (2018.01); H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
C30B 25/04 (2013.01); C09J 5/06 (2013.01); C09J 7/35 (2018.01); C23C 16/042 (2013.01); C23C 16/305 (2013.01); C30B 25/18 (2013.01); C30B 29/46 (2013.01); G03F 7/0015 (2013.01); H01L 21/0262 (2013.01); H01L 21/02381 (2013.01); H01L 21/02422 (2013.01); H01L 21/02488 (2013.01); H01L 21/02568 (2013.01); H01L 21/02639 (2013.01); H01L 21/02642 (2013.01); H01L 21/2007 (2013.01); H01L 21/6835 (2013.01); H01L 21/7813 (2013.01); C09J 2203/326 (2013.01); H01L 2221/68363 (2013.01);
Abstract

The exemplary embodiments describe techniques for a controlled chemical vapor deposition growth and transfer of arrayed TMD monolayers on predetermined locations, which enable the formation of single crystalline TMD monolayer arrays on specific locations. The unique growth process includes the patterning of transition metal oxide (e.g., MoO) on the source substrate contacting the growth substrate face-to-face, where the growth of single crystalline TMD monolayers with controlled size and location, exclusively on predetermined locations on the growth substrates is accomplished. These TMD arrays can be align-transferred using a unique process that combines the wet and stamping transfer processes onto any target substrate with a pin-point accuracy, which dramatically enhances the integrity of transferred TMDs.


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